Inventor
PONNEKANTI HARI K
US26 patents
⚠️ This page may combine multiple inventors who share the name “PONNEKANTI HARI K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
25 patentsUS6635115B1Oct 21, 2003
Tandem process chamber
APPLIED MATERIALS INC500 citations98
US6152070ANov 28, 2000
Tandem process chamber
APPLIED MATERIALS INC455 citations98
US5911834AJun 15, 1999
Gas delivery system
APPLIED MATERIALS INC133 citations98
US5855681AJan 5, 1999
Ultra high throughput wafer vacuum processing system
APPLIED MATERIALS INC1,143 citations98
US6082950AJul 4, 2000
Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding
APPLIED MATERIALS INC154 citations97
US10056279B2Aug 21, 2018
Semiconductor process equipment
APPLIED MATERIALS INC22 citations94
US6831284B2Dec 14, 2004
Large area source for uniform electron beam generation
APPLIED MATERIALS INC59 citations94
US9040409B2May 26, 2015
Methods of forming solar cells and solar cell modules
APPLIED MATERIALS INC34 citations92
US6077157AJun 20, 2000
Process chamber exhaust system
APPLIED MATERIALS INC42 citations92
US7655092B2Feb 2, 2010
Tandem process chamber
APPLIED MATERIALS INC27 citations91
US10734265B2Aug 4, 2020
Semiconductor process equipment
APPLIED MATERIALS INC13 citations85
US10483141B2Nov 19, 2019
Semiconductor process equipment
APPLIED MATERIALS INC13 citations84
US10236197B2Mar 19, 2019
Processing system containing an isolation region separating a deposition chamber from a treatment chamber
APPLIED MATERIALS INC11 citations84
US10403535B2Sep 3, 2019
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
APPLIED MATERIALS INC11 citations83
US10388549B2Aug 20, 2019
On-board metrology (OBM) design and implication in process tool
APPLIED MATERIALS INC8 citations79
US10577689B2Mar 3, 2020
Sputtering showerhead
APPLIED MATERIALS INC3 citations73
US11031262B2Jun 8, 2021
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC2 citations71
US10636684B2Apr 28, 2020
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US10403515B2Sep 3, 2019
Loadlock integrated bevel etcher system
APPLIED MATERIALS INC1 citations71
US7049606B2May 23, 2006
Electron beam treatment apparatus
APPLIED MATERIALS INC3 citations63
US10597785B2Mar 24, 2020
Single oxide metal deposition chamber
APPLIED MATERIALS INC0 citations52
US10435787B2Oct 8, 2019
Hydrogen partial pressure control in a vacuum process chamber
APPLIED MATERIALS INC0 citations51
US10518418B2Dec 31, 2019
Wafer swapper
APPLIED MATERIALS INC0 citations49
US9889567B2Feb 13, 2018
Wafer swapper
APPLIED MATERIALS INC0 citations49
US10854432B2Dec 1, 2020
Rotary plasma electrical feedthrough
APPLIED MATERIALS INC0 citations42