Inventor

LU ZHENGKAI

CN2 patents

Patents

2 patents

US12372988B2Jul 29, 2025

Method of controlling mixed liquid to be delivered for SPM solution

PNC PROCESS SYSTEMS CO LTD0 citations39

US12334368B2Jun 17, 2025

Liquid delivering system for wafer cleaning equipment

PNC PROCESS SYSTEMS CO LTD0 citations37