Inventor
LAI CHING-LUN
TW15 patents
⚠️ This page may combine multiple inventors who share the name “LAI CHING-LUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
14 patentsUS9873943B2Jan 23, 2018
Apparatus and method for spatial atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10161039B2Dec 25, 2018
Apparatus and method for spatial atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11008654B2May 18, 2021
Apparatus and method for spatial atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12009208B2Jun 11, 2024
Deposition equipment with adjustable temperature source
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9478617B2Oct 25, 2016
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations59
US9202916B2Dec 1, 2015
Semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12068317B2Aug 20, 2024
Integrated circuit with anti-punch through control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11315921B2Apr 26, 2022
Integrated circuit with anti-punch through control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11715639B2Aug 1, 2023
Semiconductor device and fabrication method therefor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11183405B2Nov 23, 2021
Semiconductor manufacturing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US10494716B2Dec 3, 2019
Apparatus and method for spatial atomic layer deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9871137B2Jan 16, 2018
Method for forming semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10043892B2Aug 7, 2018
Method for manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10269599B2Apr 23, 2019
Semiconductor manufacturing apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44