Inventor
MINSHALL TED
US7 patents
Patents
7 patentsUS9698042B1Jul 4, 2017
Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edge
LAM RES CORP23 citations93
US9793096B2Oct 17, 2017
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP16 citations92
US10665429B2May 26, 2020
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP6 citations83
US9920844B2Mar 20, 2018
Valve manifold deadleg elimination via reentrant flow path
LAM RES CORP3 citations72
US9460915B2Oct 4, 2016
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP3 citations71
US11127567B2Sep 21, 2021
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity
LAM RES CORP0 citations62
US9852901B2Dec 26, 2017
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP0 citations51