Inventor
MAGARA TAKASHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MAGARA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS6756235B1Jun 29, 2004
Metal oxide film formation method and apparatus
TOKYO ELECTRON LTD219 citations98
US6485564B1Nov 26, 2002
Thin film forming method
TOKYO ELECTRON LTD24 citations92
US7383841B2Jun 10, 2008
Method of cleaning substrate-processing device and substrate-processing device
TOKYO ELECTRON LTD10 citations83