Inventor
TAGA SATOSHI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “TAGA SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS10557190B2Feb 11, 2020
Substrate processing apparatus and susceptor
TOKYO ELECTRON LTD5 citations83
US10941477B2Mar 9, 2021
Substrate processing apparatus and susceptor
TOKYO ELECTRON LTD0 citations62
US11676847B2Jun 13, 2023
Substrate placing table and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11508603B2Nov 22, 2022
Substrate placing table and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11217470B2Jan 4, 2022
Substrate placing table and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11227786B2Jan 18, 2022
Method of manufacturing electrostatic chuck and electrostsatic chuck
TOKYO ELECTRON LTD0 citations52
US9976217B2May 22, 2018
Film forming method using reversible decomposition reaction
TOKYO ELECTRON LTD1 citations52
US9777362B2Oct 3, 2017
Electrode manufacturing apparatus for lithium ion capacitor
TOKYO ELECTRON LTD0 citations51
US9587300B2Mar 7, 2017
Electrode manufacturing apparatus for lithium ion capacitor and electrode manufacturing method therefor
TOKYO ELECTRON LTD1 citations51
HARA MASAMICHI
4 patentsUS9404180B2Aug 2, 2016
Deposition device
HARA MASAMICHI6 citations71
US9202728B2Dec 1, 2015
Substrate mounting mechanism, and substrate processing apparatus
HARA MASAMICHI2 citations61
US9062374B2Jun 23, 2015
Method for film formation, apparatus for film formation, and computer-readable recording medium
HARA MASAMICHI0 citations51
US8273409B2Sep 25, 2012
Method for film formation, apparatus for film formation, and computer-readable recording medium
HARA MASAMICHI0 citations51