Inventor

ZELLENRATH MARK

NL3 patents

⚠️ This page may combine multiple inventors who share the name “ZELLENRATH MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HOFMANS GERARDUS CAROLUS JOHANNUS

2 patents

US8436998B2May 7, 2013

Method of measuring focus of a lithographic projection apparatus

HOFMANS GERARDUS CAROLUS JOHANNUS3 citations56

US8289516B2Oct 16, 2012

Method of measuring focus of a lithographic projection apparatus

HOFMANS GERARDUS CAROLUS JOHANNUS2 citations56

ZEISS CARL SMT GMBH

1 patent

US10073361B2Sep 11, 2018

EUV lithography system and operating method

ZEISS CARL SMT GMBH5 citations65