Inventor

WAGNER HEIKO

DE6 patents

⚠️ This page may combine multiple inventors who share the name “WAGNER HEIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO DEVICES INC

3 patents

US7325224B2Jan 29, 2008

Method and system for increasing product yield by controlling lithography on the basis of electrical speed data

ADVANCED MICRO DEVICES INC22 citations90

US7006195B2Feb 28, 2006

Method and system for improving exposure uniformity in a step and repeat process

ADVANCED MICRO DEVICES INC4 citations60

US7346407B2Mar 18, 2008

Method of operating an advanced process controller by dynamically adapting hierarchy levels

ADVANCED MICRO DEVICES INC0 citations49

GLOBALFOUNDRIES INC

3 patents

US7962459B2Jun 14, 2011

Method of providing context specific recipes in a semiconductor facility by defining product categories

GLOBALFOUNDRIES INC0 citations45

US10007198B2Jun 26, 2018

Method including an adjustment of a plurality of wafer handling elements, system including a plurality of wafer handling elements and photolithography track

GLOBALFOUNDRIES INC0 citations41

US10146132B2Dec 4, 2018

Mobile dispense device for chemicals used in micro-processing

GLOBALFOUNDRIES INC0 citations33