Inventor
KOMATSU TOORU
JP3 patents
Patents
3 patentsUS11220740B2Jan 11, 2022
Method of manufacturing sputtering target and sputtering target
TOSHIBA KK0 citations56
US11198933B2Dec 14, 2021
Method of manufacturing sputtering target and sputtering target
TOSHIBA KK0 citations56
US10533248B2Jan 14, 2020
Method of manufacturing sputtering target and sputtering target
TOSHIBA KK0 citations46