Inventor

TANASE YOSHI

US2 patents

Patents

2 patents

US5486975AJan 23, 1996

Corrosion resistant electrostatic chuck

APPLIED MATERIALS INC116 citations95

US5801386ASep 1, 1998

Apparatus for measuring plasma characteristics within a semiconductor wafer processing system and a method of fabricating and using same

APPLIED MATERIALS INC36 citations92