Inventor · disambiguated record

Sang-Hyuk Chung

Also filed as: CHUNG SANG-HYUK

1 granted patent·6 citations·filing 2001–2001

28Inventor score

Technology areasY02P

Files withSAMSUNG ELECTRONICS CO LTD1

Top patents by PatentIndex Score

1 record

0158US6602323B2Method and apparatus for reducing PFC emission during semiconductor manufactureSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Aug 5, 2003·6 cites·17 claims

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