Inventor
ROOBOL SANDER BAS
NL22 patents
Patents
22 patentsUS10379448B2Aug 13, 2019
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
ASML NETHERLANDS BV3 citations73
US10133192B2Nov 20, 2018
Method and apparatus for determining the property of a structure, device manufacturing method
ASML NETHERLANDS BV6 citations73
US10067068B2Sep 4, 2018
Lithographic apparatus and method for performing a measurement
ASML NETHERLANDS BV5 citations73
US10976265B2Apr 13, 2021
Optical detector
ASML NETHERLANDS BV2 citations72
US10451559B2Oct 22, 2019
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV3 citations72
US10330606B2Jun 25, 2019
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV3 citations72
US10234771B2Mar 19, 2019
HHG source, inspection apparatus and method for performing a measurement
ASML NETHERLANDS BV2 citations72
US11092902B2Aug 17, 2021
Method and apparatus for detecting substrate surface variations
ASML NETHERLANDS BV2 citations70
US10816906B2Oct 27, 2020
HHG source, inspection apparatus and method for performing a measurement
ASML NETHERLANDS BV1 citations62
US10267744B2Apr 23, 2019
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV1 citations62
US12269229B2Apr 8, 2025
Reflector manufacturing method and associated reflector
ASML NETHERLANDS BV0 citations61
US10530111B2Jan 7, 2020
Apparatus for delivering gas and illumination source for generating high harmonic radiation
ASML NETHERLANDS BV1 citations61
US10248029B2Apr 2, 2019
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV1 citations61
US10983361B2Apr 20, 2021
Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus
ASML NETHERLANDS BV0 citations60
US10670974B2Jun 2, 2020
Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate
ASML NETHERLANDS BV1 citations60
US11626704B2Apr 11, 2023
Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
ASML NETHERLANDS BV1 citations59
US11353796B2Jun 7, 2022
Method and apparatus for determining a radiation beam intensity profile
ASML NETHERLANDS BV0 citations56
US10048596B2Aug 14, 2018
Method and apparatus for generating illuminating radiation
ASML NETHERLANDS BV0 citations52
US10649344B2May 12, 2020
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV0 citations51
US10630037B2Apr 21, 2020
Apparatus for delivering gas and illumination source for generating high harmonic radiation
ASML NETHERLANDS BV0 citations51
US10578979B2Mar 3, 2020
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations51
US10725387B2Jul 28, 2020
Determining an edge roughness parameter of a periodic structure
ASML NETHERLANDS BV0 citations49