Inventor

MATHIJSSEN SIMON GIJSBERT JOSEPHUS

NL60 patents

⚠️ This page may combine multiple inventors who share the name “MATHIJSSEN SIMON GIJSBERT JOSEPHUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATHIJSSEN SIMON GIJSBERT JOSEPHUS

ASML NETHERLANDS BV

Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method

Metrology sensor for position metrology

Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method

Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method

Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus

Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus

Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method

Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method

Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus

Method and apparatus for determining the property of a structure, device manufacturing method

Lithographic apparatus and method for performing a measurement

Position measurement with illumination profile having two diametrically opposed off-axis radiation

Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method

Polarization independent interferometer

Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method

Alignment sensor, lithographic apparatus and alignment method

Metrology sensor, lithographic apparatus and method for manufacturing devices

Metrology apparatus, lithographic system, and method of measuring a structure

Illumination source for an inspection apparatus, inspection apparatus and inspection method

Illumination source for an inspection apparatus, inspection apparatus and inspection method

HHG source, inspection apparatus and method for performing a measurement

Metrology method and associated metrology and lithographic apparatuses

Alignment system

Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method

Position measuring method of an alignment target

Metrology method and apparatus and computer program

Alignment sensor for lithographic apparatus

Substrate edge detection

Metrology method and apparatus and computer program

Illumination and detection apparatus for a metrology apparatus

Method for overlay metrology and apparatus thereof

Method for inferring a local uniformity metric

Inspection apparatus and methods, substrates having metrology targets, lithographic system and device manufacturing method

HHG source, inspection apparatus and method for performing a measurement

Metrology in lithographic processes

Illumination source for an inspection apparatus, inspection apparatus and inspection method

Apparatus for delivering gas and illumination source for generating high harmonic radiation

Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus

Metrology method

Method and system for determining information about a target structure

Method to determine a patterning process parameter

Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method

Metrology method for measuring an etched trench and associated metrology apparatus

Method and apparatus for generating illuminating radiation

Inspection method and apparatus, substrates for use therein and device manufacturing method

Mark position determination method

Illumination source for an inspection apparatus, inspection apparatus and inspection method

Apparatus for delivering gas and illumination source for generating high harmonic radiation

VRIJE UNIV AMSTERDAM

Inspection apparatus, inspection method and manufacturing method

ASML HOLDING NV

Generating an alignment signal based on local alignment mark distortions