Inventor
BUSTRAAN KRIJN FREDERIK
NL8 patents
⚠️ This page may combine multiple inventors who share the name “BUSTRAAN KRIJN FREDERIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS10530111B2Jan 7, 2020
Apparatus for delivering gas and illumination source for generating high harmonic radiation
ASML NETHERLANDS BV1 citations61
US7667822B2Feb 23, 2010
Lithographic apparatus and stage apparatus
ASML NETHERLANDS BV6 citations60
US11003095B2May 11, 2021
Positioning system and lithographic apparatus
ASML NETHERLANDS BV1 citations58
US12399436B2Aug 26, 2025
Substrate holder, carrier system comprising a substrate holder and lithographic apparatus
ASML NETHERLANDS BV0 citations53
US10630037B2Apr 21, 2020
Apparatus for delivering gas and illumination source for generating high harmonic radiation
ASML NETHERLANDS BV0 citations51
US11421729B2Aug 23, 2022
Elastic guiding device, positioning device, blade and lithographic apparatus
ASML NETHERLANDS BV0 citations42