Inventor
SMORENBURG PETRUS WILHELMUS
NL15 patents
Patents
15 patentsUS10362665B2Jul 23, 2019
Methods and apparatus for optical metrology
ASML NETHERLANDS BV2 citations71
US10642172B2May 5, 2020
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV2 citations68
US10530111B2Jan 7, 2020
Apparatus for delivering gas and illumination source for generating high harmonic radiation
ASML NETHERLANDS BV1 citations61
US12196688B2Jan 14, 2025
Method and apparatus for efficient high harmonic generation
ASML NETHERLANDS BV0 citations60
US10996568B2May 4, 2021
Methods and apparatus for metrology
ASML NETHERLANDS BV1 citations60
US10670974B2Jun 2, 2020
Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate
ASML NETHERLANDS BV1 citations60
US11347155B2May 31, 2022
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV0 citations58
US12517441B2Jan 6, 2026
Cleaning method and associated illumination source metrology apparatus
ASML NETHERLANDS BV0 citations56
US12044951B2Jul 23, 2024
Illumination source and associated metrology apparatus
ASML NETHERLANDS BV0 citations54
US12520412B2Jan 6, 2026
Methods and apparatus for controlling electron density distributions
ASML NETHERLANDS BV0 citations52
US12474267B2Nov 18, 2025
Wavefront metrology sensor and mask therefor, method for optimizing a mask and associated apparatuses
ASML NETHERLANDS BV0 citations52
US10630037B2Apr 21, 2020
Apparatus for delivering gas and illumination source for generating high harmonic radiation
ASML NETHERLANDS BV0 citations51
US11223181B2Jan 11, 2022
High harmonic generation radiation source
ASML NETHERLANDS BV0 citations47
US12411421B2Sep 9, 2025
Metrology apparatus based on high harmonic generation and associated method
ASML NETHERLANDS BV0 citations41
US10381796B2Aug 13, 2019
Free electron laser
ASML NETHERLANDS BV0 citations39