Inventor
BRUSSAARD GERRIT JACOBUS HENDRIK
NL11 patents
Patents
11 patentsUS10362665B2Jul 23, 2019
Methods and apparatus for optical metrology
ASML NETHERLANDS BV2 citations71
US9853412B2Dec 26, 2017
Radiation source
ASML NETHERLANDS BV4 citations69
US10642172B2May 5, 2020
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV2 citations68
US10530111B2Jan 7, 2020
Apparatus for delivering gas and illumination source for generating high harmonic radiation
ASML NETHERLANDS BV1 citations61
US10670974B2Jun 2, 2020
Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate
ASML NETHERLANDS BV1 citations60
US11347155B2May 31, 2022
Illumination source for an inspection apparatus, inspection apparatus and inspection method
ASML NETHERLANDS BV0 citations58
US10900829B2Jan 26, 2021
Radiation sensor apparatus
ASML NETHERLANDS BV0 citations55
US12050392B2Jul 30, 2024
Waveguides and manufacturing methods thereof
ASML NETHERLANDS BV1 citations52
US10630037B2Apr 21, 2020
Apparatus for delivering gas and illumination source for generating high harmonic radiation
ASML NETHERLANDS BV0 citations51
US10468225B2Nov 5, 2019
Electron source for a free electron laser
ASML NETHERLANDS BV0 citations50
US11223181B2Jan 11, 2022
High harmonic generation radiation source
ASML NETHERLANDS BV0 citations47