Inventor
NAKÌBO{HACEK OVER (G)}LU GÜNEŞ
NL3 patents
Patents
3 patentsUS11036148B2Jun 15, 2021
Patterning device cooling system and method of thermally conditioning a patterning device
ASML NETHERLANDS BV0 citations59
US10642166B2May 5, 2020
Patterning device cooling apparatus
ASML NETHERLANDS BV0 citations48
US10775707B2Sep 15, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations31