Inventor
WILL MANON ELISE
NL3 patents
Patents
3 patentsUS9494875B2Nov 15, 2016
Chuck, a chuck control system, a lithography apparatus and a method of using a chuck
ASML NETHERLANDS BV4 citations70
US9429857B2Aug 30, 2016
Electrostatic clamp, lithographic apparatus and method
ASML NETHERLANDS BV1 citations48
US10775707B2Sep 15, 2020
Lithographic apparatus and method
ASML NETHERLANDS BV0 citations31