Inventor
BERNEY BUTCH
US11 patents
⚠️ This page may combine multiple inventors who share the name “BERNEY BUTCH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
6 patentsUS7611640B1Nov 3, 2009
Minimizing arcing in a plasma processing chamber
LAM RES CORP365 citations99
US7086347B2Aug 8, 2006
Apparatus and methods for minimizing arcing in a plasma processing chamber
LAM RES CORP380 citations99
US6270862B1Aug 7, 2001
Method for high density plasma chemical vapor deposition of dielectric films
LAM RES CORP88 citations97
US6184158B1Feb 6, 2001
Inductively coupled plasma CVD
LAM RES CORP193 citations97
US6203657B1Mar 20, 2001
Inductively coupled plasma downstream strip module
LAM RES CORP139 citations95
US6692649B2Feb 17, 2004
Inductively coupled plasma downstream strip module
LAM RES CORP42 citations89
LAM RES AG
4 patentsUS10861719B2Dec 8, 2020
Method and apparatus for processing wafer-shaped articles
LAM RES AG2 citations71
US10720343B2Jul 21, 2020
Method and apparatus for processing wafer-shaped articles
LAM RES AG5 citations71
US10312117B2Jun 4, 2019
Apparatus and radiant heating plate for processing wafer-shaped articles
LAM RES AG3 citations71
US12198945B2Jan 14, 2025
Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures
LAM RES AG0 citations58