Inventor

CHEN HSIN-FENG

TW23 patents

⚠️ This page may combine multiple inventors who share the name “CHEN HSIN-FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN HSIN-FENG

TAIWAN SEMICONDUCTOR MFG CO LTD

Pressurized tin collection bucket with in-line draining mechanism

Light source for lithography exposure process

Light source for lithography exposure process

Apparatus for decontaminating windows of an EUV source module

Radiation source apparatus and method for using the same

System and method for supplying target material in an EUV light source

Lithography system and method thereof

EUV photolithography system fuel source and methods of operating the same

Plasma position control for extreme ultraviolet lithography light sources

Method for using radiation source apparatus

Plasma position control for extreme ultraviolet lithography light sources

Semiconductor processing tool and methods of operation

Droplet generator assembly and method for using the same and radiation source apparatus

Lithography system and method thereof

Pressurized tin collection bucket with in-line draining mechanism

EUV photolithography system fuel source and methods of operating the same

Method and system for generating droplets for EUV photolithography processes

Method and system for generating droplets for EUV photolithography processes

EUV photolithography system and methods of operating the same

Pressurized tin collection bucket with in-line draining mechanism

Light source for lithography exposure process

Droplet generator assembly and method of replacing components

IND TECH RES INST

Optical communication device and optical communication method