Inventor
MALKOVA NATALIA
US11 patents
⚠️ This page may combine multiple inventors who share the name “MALKOVA NATALIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS9405290B1Aug 2, 2016
Model for optical dispersion of high-K dielectrics including defects
KLA TENCOR CORP19 citations92
US9595481B1Mar 14, 2017
Dispersion model for band gap tracking
KLA TENCOR CORP18 citations91
US10410935B1Sep 10, 2019
Dispersion model for band gap tracking
KLA TENCOR CORP1 citations72
US9664734B2May 30, 2017
Multi-oscillator, continuous Cody-Lorentz model of optical dispersion
KLA TENCOR CORP6 citations72
US11156548B2Oct 26, 2021
Measurement methodology of advanced nanostructures
KLA TENCOR CORP6 citations69
US10429296B2Oct 1, 2019
Multilayer film metrology using an effective media approximation
KLA TENCOR CORP0 citations36