Inventor
XIAO WEN
SG32 patents
⚠️ This page may combine multiple inventors who share the name “XIAO WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
26 patentsUS11422096B2Aug 23, 2022
Surface topography measurement apparatus and method
APPLIED MATERIALS INC6 citations85
US11789358B2Oct 17, 2023
Extreme ultraviolet mask blank defect reduction
APPLIED MATERIALS INC0 citations62
US11720013B2Aug 8, 2023
Graded interface in Bragg reflector
APPLIED MATERIALS INC0 citations62
US11604151B2Mar 14, 2023
Surface topography measurement apparatus and method
APPLIED MATERIALS INC0 citations62
US11599016B2Mar 7, 2023
Physical vapor deposition system and processes
APPLIED MATERIALS INC0 citations62
US11557473B2Jan 17, 2023
System and method to control PVD deposition uniformity
APPLIED MATERIALS INC1 citations62
US11385536B2Jul 12, 2022
EUV mask blanks and methods of manufacture
APPLIED MATERIALS INC0 citations62
US11366379B2Jun 21, 2022
Extreme ultraviolet mask with embedded absorber layer
APPLIED MATERIALS INC0 citations62
US11327394B2May 10, 2022
Graded interface in bragg reflector
APPLIED MATERIALS INC0 citations62
US11237473B2Feb 1, 2022
Physical vapor deposition system and processes
APPLIED MATERIALS INC0 citations62
US11194244B2Dec 7, 2021
Extreme ultraviolet mask absorber and processes for manufacture
APPLIED MATERIALS INC0 citations62
US11630385B2Apr 18, 2023
Extreme ultraviolet mask absorber materials
APPLIED MATERIALS INC0 citations61
US11556053B2Jan 17, 2023
Extreme ultraviolet mask blank hard mask materials
APPLIED MATERIALS INC0 citations61
US11537040B2Dec 27, 2022
Extreme ultraviolet mask blank hard mask materials
APPLIED MATERIALS INC0 citations61
US11480865B2Oct 25, 2022
Method and apparatus to improve EUV mask blank flatness
APPLIED MATERIALS INC0 citations61
US11669008B2Jun 6, 2023
Extreme ultraviolet mask blank defect reduction methods
APPLIED MATERIALS INC0 citations60
US11480866B2Oct 25, 2022
Method and apparatus to anneal EUV mask blank
APPLIED MATERIALS INC0 citations60
US11815803B2Nov 14, 2023
Multilayer extreme ultraviolet reflector materials
APPLIED MATERIALS INC0 citations59
US11782337B2Oct 10, 2023
Multilayer extreme ultraviolet reflectors
APPLIED MATERIALS INC0 citations59
US11639544B2May 2, 2023
Physical vapor deposition system and processes
APPLIED MATERIALS INC0 citations52
US11542595B2Jan 3, 2023
Physical vapor deposition system and processes
APPLIED MATERIALS INC0 citations52
US11390940B2Jul 19, 2022
System and method to control PVD deposition uniformity
APPLIED MATERIALS INC0 citations52
US11365475B2Jun 21, 2022
Physical vapor deposition chamber cleaning processes
APPLIED MATERIALS INC0 citations51
US11762278B2Sep 19, 2023
Multilayer extreme ultraviolet reflectors
APPLIED MATERIALS INC0 citations49
US11467499B2Oct 11, 2022
System and method of measuring refractive index of EUV mask absorber
APPLIED MATERIALS INC0 citations49
US11366059B2Jun 21, 2022
System and method to measure refractive index at specific wavelengths
APPLIED MATERIALS INC0 citations49