Inventor
YOONG HERNG YAU
SG5 patents
Patents
5 patentsUS11480866B2Oct 25, 2022
Method and apparatus to anneal EUV mask blank
APPLIED MATERIALS INC0 citations60
US11782337B2Oct 10, 2023
Multilayer extreme ultraviolet reflectors
APPLIED MATERIALS INC0 citations59
US11762278B2Sep 19, 2023
Multilayer extreme ultraviolet reflectors
APPLIED MATERIALS INC0 citations49
US11467499B2Oct 11, 2022
System and method of measuring refractive index of EUV mask absorber
APPLIED MATERIALS INC0 citations49
US11366059B2Jun 21, 2022
System and method to measure refractive index at specific wavelengths
APPLIED MATERIALS INC0 citations49