Inventor
HWANG MYUNG-SOO
KR5 patents
Patents
5 patentsUS9874809B2Jan 23, 2018
Pellicle for a reflective mask and reflective mask assembly including the same
SAMSUNG ELECTRONICS CO LTD2 citations71
US12189295B2Jan 7, 2025
Spin coater and semiconductor fabrication method using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US11537047B2Dec 27, 2022
Spin coater and semiconductor fabrication method for reducing regeneration of photoresist
SAMSUNG ELECTRONICS CO LTD0 citations57
US9996009B2Jun 12, 2018
Extreme ultraviolet (EUV) exposure system and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations50
US9575421B2Feb 21, 2017
Apparatus for protecting extreme ultra violet mask and extreme ultra violet exposure apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations48