Inventor
YOON KWANGSUB
KR9 patents
Patents
9 patentsUS10096546B2Oct 9, 2018
Semiconductor device
SAMSUNG ELECTRONICS CO LTD6 citations82
US9780033B2Oct 3, 2017
Semiconductor device and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD7 citations82
US10211156B2Feb 19, 2019
Semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations71
US9443732B1Sep 13, 2016
Method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD3 citations65
US12189295B2Jan 7, 2025
Spin coater and semiconductor fabrication method using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US11537047B2Dec 27, 2022
Spin coater and semiconductor fabrication method for reducing regeneration of photoresist
SAMSUNG ELECTRONICS CO LTD0 citations57
US9461003B1Oct 4, 2016
Semiconductor devices having shielding pattern
SAMSUNG ELECTRONICS CO LTD2 citations53
US11097211B2Aug 24, 2021
Resist filtering system having multi filters and apparatus having the resist filtering system
SAMSUNG ELECTRONICS CO LTD0 citations52
US12112948B2Oct 8, 2024
Method of manufacturing integrated circuit device using a metal-containing photoresist composition
SAMSUNG ELECTRONICS CO LTD0 citations43