Inventor

SHIGA YUTAKA

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SHIGA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIN ETSU HANDOTAI CO LTD

1 patent

US12345660B2Jul 1, 2025

Method for evaluating crystal defects in silicon carbide single crystal wafer

SHIN ETSU HANDOTAI CO LTD0 citations50

SHIGA YUTAKA

1 patent

US8729676B2May 20, 2014

Silicon epitaxial wafer and method for manufacturing the same

SHIGA YUTAKA0 citations37