Inventor
BURKMAN DON C
US4 patents
Patents
4 patentsUS4609575ASep 2, 1986
Method of apparatus for applying chemicals to substrates in an acid processing system
FSI CORP61 citations93
US4682615AJul 28, 1987
Rinsing in acid processing of substrates
FSI CORP60 citations91
US4816081AMar 28, 1989
Apparatus and process for static drying of substrates
FSI CORP70 citations90
US4801335AJan 31, 1989
Rinsing in acid processing of substrates
FSI CORP26 citations87