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Inventor
GARETTO ANTHONY
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “GARETTO ANTHONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
1 patent
US10055833B2
Aug 21, 2018
Method and system for EUV mask blank buried defect analysis
ZEISS CARL SMT GMBH
2 citations
66
ZEISS CARL SMS GMBH
1 patent
US9261775B2
Feb 16, 2016
Method for analyzing a photomask
ZEISS CARL SMS GMBH
3 citations
62