Inventor

BERTELE ANDREAS

DE2 patents

⚠️ This page may combine multiple inventors who share the name “BERTELE ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SIGEL BENJAMIN

1 patent

US9030644B2May 12, 2015

Projection exposure apparatus for semiconductor lithography including an actuator system

SIGEL BENJAMIN1 citations39

BERTELE ANDREAS

1 patent

US8528461B2Sep 10, 2013

Force actuator

BERTELE ANDREAS0 citations37