Inventor

FUCHIGAMI SHINJI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “FUCHIGAMI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US9466468B2Oct 11, 2016

Shower head, plasma processing apparatus and plasma processing method

TOKYO ELECTRON LTD8 citations80

UDA SHUICHIRO

1 patent

US9048191B2Jun 2, 2015

Plasma etching method

UDA SHUICHIRO0 citations31