Inventor

TUNG CHI-FENG

TW37 patents

⚠️ This page may combine multiple inventors who share the name “TUNG CHI-FENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TUNG CHI-FENG

TAIWAN SEMICONDUCTOR MFG CO LTD

Stocker system for wafer cassette

Material management method and system

System for a semiconductor fabrication facility and method for operating the same

Conveying system and method for operating the same

High capacity overhead transport (OHT) rail system with multiple levels

System for a semiconductor fabrication facility and method for operating the same

Stocking system

System for a semiconductor fabrication facility and method for operating the same

Overhead transport system

Conveying system and method for operating the same

System for a semiconductor fabrication facility and method for operating the same

Transport system, associated movable container and method

Transport system of semiconductor fabrication facility, associated movable container and method

Hash overhead hoist transport rail system and methods of operating the same

Material management method and system

Installation and relocation of mobile stocker

Method for operating conveying system

Overhead hoist transport device and method of using the same

Method for operating conveying system

System and method for automated material handling management

Method for operating conveying system

Overhead hoist transport device and method of using the same

Method and apparatus for unpacking semiconductor wafer container

Storage environment monitoring system and methods of operation

Stocker system for wafer cassette

Storage for extreme ultraviolet light lithography

System for a semiconductor fabrication facility and method for operating the same

System for a semiconductor fabrication facility and method for operating the same

High density semiconductor storage system

Method and apparatus for unpacking semiconductor wafer container

Payload transportation system

Wafer transportation

Stocker

Photolithography system, method for transporting photo-mask and unit therein

System for a semiconductor fabrication facility and method for operating the same

TUNG CHI-FENG

Automated material handling system and method for semiconductor manufacturing

WANG WEI-CHENG

Portable stocker and method of using same