Inventor

CHANG CHEN-FON

TW2 patents

Patents

2 patents

US12261026B2Mar 25, 2025

Method and apparatus for revitalizing plasma processing tools

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53

US11908754B2Feb 20, 2024

Method and system for controlling profile of critical dimension

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46