Inventor
OJHA SHUCHI SUNIL
US3 patents
Patents
3 patentsUS12230499B2Feb 18, 2025
Methods of post treating silicon nitride based dielectric films with high energy low dose plasma
APPLIED MATERIALS INC0 citations59
US11967524B2Apr 23, 2024
3D NAND gate stack reinforcement
APPLIED MATERIALS INC0 citations59
US12374584B2Jul 29, 2025
Multi color stack for self aligned dual pattern formation for multi purpose device structures
APPLIED MATERIALS INC0 citations50