Inventor

SHYU JAMES

TW2 patents

Patents

2 patents

US7094659B2Aug 22, 2006

Method of forming deep trench capacitors

PROMOS TECHNOLOGIES INC13 citations75

US6995451B2Feb 7, 2006

Buried collar trench capacitor formed by LOCOS using self starved ALD nitride as an oxidation mask

PROMOS TECHNOLOGIES INC0 citations43