Inventor
VENNAT ERIC PIERRE-YVES
NL2 patents
Patents
2 patentsUS11029612B2Jun 8, 2021
Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
ASML NETHERLANDS BV5 citations66
US11835106B2Dec 5, 2023
Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing method
ASML NETHERLANDS BV0 citations41