P

Inventor

AGARWAL ASHUTOSH

US37 patents
⚠️ This page may combine multiple inventors who share the name “AGARWAL ASHUTOSH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

19 patents
USD1037778SAug 6, 2024

Gas distribution plate

APPLIED MATERIALS INC13 citations83
USD1080812SJun 24, 2025

Gas mixer

APPLIED MATERIALS INC6 citations81
US9879341B2Jan 30, 2018

Method and apparatus for microwave assisted chalcogen radicals generation for 2-D materials

APPLIED MATERIALS INC4 citations73
US11818810B2Nov 14, 2023

Heater assembly with purge gap control and temperature uniformity for batch processing chambers

APPLIED MATERIALS INC2 citations71
US11384432B2Jul 12, 2022

Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate

APPLIED MATERIALS INC5 citations71
US12224198B2Feb 11, 2025

Electrostatic chuck with mesas

APPLIED MATERIALS INC0 citations62
US12018376B2Jun 25, 2024

Apparatus and methods for motor shaft and heater leveling

APPLIED MATERIALS INC0 citations62
US11955361B2Apr 9, 2024

Electrostatic chuck with mesas

APPLIED MATERIALS INC0 citations62
US11746417B2Sep 5, 2023

Clean isolation valve for reduced dead volume

APPLIED MATERIALS INC0 citations62
US11479857B2Oct 25, 2022

Clean isolation valve for reduced dead volume

APPLIED MATERIALS INC0 citations62
US11932939B2Mar 19, 2024

Lids and lid assembly kits for atomic layer deposition chambers

APPLIED MATERIALS INC0 citations60
US11549183B2Jan 10, 2023

Showerhead with inlet mixer

APPLIED MATERIALS INC0 citations60
US10907252B2Feb 2, 2021

Horizontal heat choke faceplate design

APPLIED MATERIALS INC0 citations60
US11769684B2Sep 26, 2023

Wafer heater with backside and integrated bevel purge

APPLIED MATERIALS INC0 citations59
US12060638B2Aug 13, 2024

Deposition apparatus and methods using staggered pumping locations

APPLIED MATERIALS INC0 citations52
US12540398B2Feb 3, 2026

Showerhead pumping geometry for precursor containment

APPLIED MATERIALS INC0 citations50
US12183618B2Dec 31, 2024

Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool

APPLIED MATERIALS INC0 citations50
US12057333B2Aug 6, 2024

Metrology slot plates

APPLIED MATERIALS INC0 citations47
US11823939B2Nov 21, 2023

Apparatus and methods for processing chamber lid concentricity alignment

APPLIED MATERIALS INC0 citations44

JUBILANT ORGANOSYS LTD

4 patents

JUBILANT LIFE SCIENCES LTD

2 patents

HARVARD COLLEGE

2 patents

KUMAR MAHENDRA

2 patents

BANSAL DEEPAK

1 patent

MICROSOFT TECHNOLOGY LICENSING LLC

1 patent

M S JUBILANT ORGANOSYS LTD

1 patent

JUBILANT DRAXIMAGE INC

1 patent

JUBILANT GENERICS LTD

1 patent

SINGH SHAILENDRA KUMAR

1 patent

COUNCIL SCIENT IND RES

1 patent

MODI GELEBITH H

1 patent