Inventor

MARSH EUGENE P

US201 patents

⚠️ This page may combine multiple inventors who share the name “MARSH EUGENE P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MARSH EUGENE P

MICRON TECHNOLOGY INC

Methods for planarization of non-planar surfaces in device fabrication

RuSixOy-containing adhesion layers and process for fabricating the same

RuSixOy-containing adhesion layers

Method for producing low carbon/oxygen conductive layers

Method for fabricating an SrRuO3 film

Method for producing low carbon/oxygen conductive layers

Methods for forming rhodium-containing layers such as platinum-rhodium barrier layers

Planarization of non-planar surfaces in device fabrication

Methods for preparing ruthenium oxide films

Methods for preparing ruthenium metal films

Device structures including ruthenium silicide diffusion barrier layers

Methods and apparatus for forming rhodium-containing layers

Deposition methods using heteroleptic precursors

Dielectric material forming methods

Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer

Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same

Method of fabricating an SrRuO3 film

Structures including low carbon/oxygen conductive layers

Low temperature deposition of barrier layers

Nucleation and deposition of PT films using ultraviolet irradiation

Process for fabricating RuSixOy-containing adhesion layers

Process for direct deposition of ALD RhO2

Metal plating using seed film

RuSixOy-containing adhesion layers and process for fabricating the same

RuSixOy-containing barrier layers for high-k dielectrics

Method of manufacturing a capacitor having RuSixOy-containing adhesion layers

Devices containing platinum-rhodium layers and methods

Devices containing platinum-iridium films and methods of preparing such films and devices

Process for low temperature atomic layer deposition of Rh

Devices containing zirconium-platinum-containing materials and methods for preparing such materials and devices

Process for fabricating RuSixOy-containing adhesion layers

Method of forming a capacitor

Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide

Method for producing low carbon/oxygen conductive layers

Diffusion barrier layers and methods of forming same

Methods for preparing ruthenium oxide films

Ruthenium silicide diffusion barrier layers and methods of forming same

Circuitry comprising roughened platinum layers, platinum-containing materials, capacitors comprising roughened platinum layers, methods forming roughened layers of platinum, and methods of forming capacitors

Registered structure formation via the application of directed thermal energy to diblock copolymer films

TWIST BIOSCIENCE CORP

Functionalized surfaces and preparation thereof

Devices and methods for oligonucleic acid library synthesis

Functionalized surfaces and preparation thereof

Methods and devices for de novo oligonucleic acid assembly

Functionalized surfaces and preparation thereof

Heated nanowells for polynucleotide synthesis

Devices and methods for oligonucleic acid library synthesis

MARSH EUGENE P

Methods of selectively forming a material using parylene coating

Multilayer antireflection coatings, structures and devices including the same and methods of making the same

Methods of patterning a substrate including multilayer antireflection coatings

MILLWARD DAN B

Registered structure formation via the application of directed thermal energy to diblock copolymer films