Inventor
KIM YONG T
KR2 patents
Patents
2 patentsUS5487923AJan 30, 1996
Method for depositing tungsten nitride thin films for formation of metal wirings of silicon semiconductor elements
KOREA INST SCI & TECH53 citations92
US5232509AAug 3, 1993
Apparatus for producing low resistivity tungsten thin film comprising reaction temperature measuring thermocouples
KOREA INST SCI & TECH17 citations70