Inventor
BOUWER ADRIANUS G
NL15 patents
⚠️ This page may combine multiple inventors who share the name “BOUWER ADRIANUS G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PHILIPS CORP
8 patentsUS4698575AOct 6, 1987
Positioning device
PHILIPS CORP76 citations96
US5327060AJul 5, 1994
Positioning device using Lorentz forces
PHILIPS CORP61 citations95
US5120034AJun 9, 1992
Two-step positioning device using lorentz forces and a static gas bearing
PHILIPS CORP92 citations95
US5204712AApr 20, 1993
Support device with a tiltable object table, and optical lithographic device provided with such a support device
PHILIPS CORP68 citations92
US4655594AApr 7, 1987
Displacement device, particularly for the photolithographic treatment of a substrate
PHILIPS CORP36 citations91
US4737823AApr 12, 1988
Opto-lithographic device comprising a displaceable lens system and method of controlling the imaging properties of lens system in such a device
PHILIPS CORP40 citations86
US4522489AJun 11, 1985
Device for photolithographically treating a thin substrate
PHILIPS CORP25 citations82
US5456134AOct 10, 1995
Magnetic transmission mechanism and applications thereof
PHILIPS CORP19 citations72
ASML NETHERLANDS BV
7 patentsUS6603130B1Aug 5, 2003
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses
ASML NETHERLANDS BV733 citations98
US6445440B1Sep 3, 2002
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV52 citations95
US6618122B2Sep 9, 2003
Movable support in a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV33 citations92
US6597433B1Jul 22, 2003
Multi-stage drive arrangements and their application in lithographic projection apparatuses
ASML NETHERLANDS BV23 citations92
US6421112B1Jul 16, 2002
Movable support in a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV26 citations92
US6844922B2Jan 18, 2005
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus
ASML NETHERLANDS BV11 citations73
US6816238B2Nov 9, 2004
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses
ASML NETHERLANDS BV3 citations62