Inventor

SPERLING FRANK B

NL5 patents

⚠️ This page may combine multiple inventors who share the name “SPERLING FRANK B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PHILIPS CORP

4 patents

US5815246ASep 29, 1998

Two-dimensionally balanced positioning device, and lithographic device provided with such a positioning device

PHILIPS CORP170 citations96

US5767948AJun 16, 1998

Lithographic device with a three-dimensionally positionable mask holder

PHILIPS CORP37 citations91

US5953105ASep 14, 1999

Positioning device with a reference frame for a measuring system, and a lithographic device provided with such a positioning device

PHILIPS CORP48 citations89

US5456134AOct 10, 1995

Magnetic transmission mechanism and applications thereof

PHILIPS CORP19 citations72

ASM LITHOGRAPHY BV

1 patent

US6054784AApr 25, 2000

Positioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning device

ASM LITHOGRAPHY BV43 citations90