Inventor
KISHII SADAHIRO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “KISHII SADAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
13 patentsUS5624300AApr 29, 1997
Apparatus and method for uniformly polishing a wafer
FUJITSU LTD231 citations98
US5562529AOct 8, 1996
Apparatus and method for uniformly polishing a wafer
FUJITSU LTD119 citations97
US5227339AJul 13, 1993
Method of manufacturing semiconductor substrate and method of manufacturing semiconductor device composed of the substrate
FUJITSU LTD45 citations92
US7064038B2Jun 20, 2006
Semiconductor device and method for fabricating the same
FUJITSU LTD12 citations81
US6114247ASep 5, 2000
Polishing cloth for use in a CMP process and a surface treatment thereof
FUJITSU LTD11 citations73
US5877089AMar 2, 1999
Slurry containing manganese oxide
FUJITSU LTD9 citations73
US5763325AJun 9, 1998
Fabrication process of a semiconductor device using a slurry containing manganese oxide
FUJITSU LTD13 citations73
US7701016B2Apr 20, 2010
Semiconductor device having device characteristics improved by straining surface of active region and its manufacture method
FUJITSU LTD7 citations72
US6159858ADec 12, 2000
Slurry containing manganese oxide and a fabrication process of a semiconductor device using such a slurry
FUJITSU LTD7 citations72
US7951686B2May 31, 2011
Method of manufacturing semiconductor device having device characteristics improved by straining surface of active region
FUJITSU LTD4 citations61
US8791561B2Jul 29, 2014
Semiconductor device and its manufacture method
FUJITSU LTD0 citations51
US8702826B2Apr 22, 2014
Abrasive agent, method for producing abrasive agents, and electronic device
FUJITSU LTD0 citations51
US7637270B2Dec 29, 2009
Method of washing a polished object
FUJITSU LTD0 citations51