Inventor
HAAS EDWIN G
US18 patents
⚠️ This page may combine multiple inventors who share the name “HAAS EDWIN G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED ENERGY SYST
8 patentsUS6180952B1Jan 30, 2001
Holder assembly system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST16 citations89
US6194733B1Feb 27, 2001
Method and apparatus for adjustably supporting a light source for use in photolithography
ADVANCED ENERGY SYST24 citations83
US6552350B2Apr 22, 2003
System and method for providing a lithographic light source for a semiconductor manufacturing process
ADVANCED ENERGY SYST5 citations72
US6190835B1Feb 20, 2001
System and method for providing a lithographic light source for a semiconductor manufacturing process
ADVANCED ENERGY SYST12 citations72
US6105885AAug 22, 2000
Fluid nozzle system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST11 citations72
US6065203AMay 23, 2000
Method of manufacturing very small diameter deep passages
ADVANCED ENERGY SYST10 citations72
US6353232B2Mar 5, 2002
Holder assembly system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST5 citations70
US6437349B1Aug 20, 2002
Fluid nozzle system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST2 citations61
NORTHROP GRUMMAN CORP
7 patentsUS5735497AApr 7, 1998
Self-leveling mount or platform for a rapid deployment system
NORTHROP GRUMMAN CORP25 citations92
US5523893AJun 4, 1996
Strain free temperature-compensated optical mounts
NORTHROP GRUMMAN CORP38 citations92
US5954175ASep 21, 1999
Modularized parallel drivetrain
NORTHROP GRUMMAN CORP34 citations89
US5781292AJul 14, 1998
Short path scanning interferometer
NORTHROP GRUMMAN CORP6 citations73
US5822876AOct 20, 1998
Surface displacement measurement gauge
NORTHROP GRUMMAN CORP12 citations71
US6227057B1May 8, 2001
Apparatus and method for rapid strain measurement
NORTHROP GRUMMAN CORP5 citations62
US5825490AOct 20, 1998
Interferometer comprising translation assemblies for moving a first optical member relative to a second optical member
NORTHROP GRUMMAN CORP4 citations62