Inventor
TU TUBY
TW11 patents
⚠️ This page may combine multiple inventors who share the name “TU TUBY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOSEL VITELIC INC
8 patentsUS6008106ADec 28, 1999
Micro-trench oxidation by using rough oxide mask for field isolation
MOSEL VITELIC INC88 citations94
US5869394AFeb 9, 1999
Teos-ozone planarization process
MOSEL VITELIC INC22 citations92
US5811344ASep 22, 1998
Method of forming a capacitor of a dram cell
MOSEL VITELIC INC37 citations90
US6037251AMar 14, 2000
Process for intermetal SOG/SOP dielectric planarization
MOSEL VITELIC INC11 citations69
US5879988AMar 9, 1999
Capacitor of a DRAM cell and method of making same
MOSEL VITELIC INC11 citations65
US5989971ANov 23, 1999
Method for forming trenched polysilicon structure
MOSEL VITELIC INC6 citations62
US5869399AFeb 9, 1999
Method for increasing utilizable surface of rugged polysilicon layer in semiconductor device
MOSEL VITELIC INC4 citations62
US5883015AMar 16, 1999
Method for using oxygen plasma treatment on a dielectric layer
MOSEL VITELIC INC3 citations59