Inventor
WALLOW THOMAS I
US19 patents
⚠️ This page may combine multiple inventors who share the name “WALLOW THOMAS I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS10417359B2Sep 17, 2019
Optical metrology of lithographic processes using asymmetric sub-resolution features to enhance measurement
ASML NETHERLANDS BV6 citations72
US10754256B2Aug 25, 2020
Method and apparatus for pattern correction and verification
ASML NETHERLANDS BV2 citations66
US10627722B2Apr 21, 2020
Etch-assist features
ASML NETHERLANDS BV1 citations62
US11658004B2May 23, 2023
Method for scanning a sample by a charged particle beam system
ASML NETHERLANDS BV0 citations61
US11127563B2Sep 21, 2021
Method for scanning a sample by a charged particle beam system
ASML NETHERLANDS BV0 citations61
US10663870B2May 26, 2020
Gauge pattern selection
ASML NETHERLANDS BV1 citations58
IBM
5 patentsUS6165678ADec 26, 2000
Lithographic photoresist composition and process for its use in the manufacture of integrated circuits
IBM59 citations96
US6177228B1Jan 23, 2001
Photoresist composition and process for its use
IBM35 citations92
US6251560B1Jun 26, 2001
Photoresist compositions with cyclic olefin polymers having lactone moiety
IBM20 citations91
US6677419B1Jan 13, 2004
Preparation of copolymers
IBM18 citations84
US6165673ADec 26, 2000
Resist composition with radiation sensitive acid generator
IBM3 citations62
GLOBALFOUNDRIES INC
3 patentsUS7718529B2May 18, 2010
Inverse self-aligned spacer lithography
GLOBALFOUNDRIES INC10 citations83
US8889343B2Nov 18, 2014
Optimizing lithographic processes using laser annealing techniques
GLOBALFOUNDRIES INC6 citations72
US7851136B2Dec 14, 2010
Stabilization of deep ultraviolet photoresist
GLOBALFOUNDRIES INC4 citations62