Inventor
MIKHAYLICH KATRINA
US11 patents
⚠️ This page may combine multiple inventors who share the name “MIKHAYLICH KATRINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS6361414B1Mar 26, 2002
Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process
LAM RES CORP83 citations96
US6616516B1Sep 9, 2003
Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates
LAM RES CORP42 citations92
US6435952B1Aug 20, 2002
Apparatus and method for qualifying a chemical mechanical planarization process
LAM RES CORP36 citations92
US6431959B1Aug 13, 2002
System and method of defect optimization for chemical mechanical planarization of polysilicon
LAM RES CORP52 citations92
US7231682B1Jun 19, 2007
Method and apparatus for simultaneously cleaning the front side and back side of a wafer
LAM RES CORP19 citations84
US6845778B2Jan 25, 2005
In-situ local heating using megasonic transducer resonator
LAM RES CORP14 citations84
US6170110B1Jan 9, 2001
Apparatus for HF-HF cleaning
LAM RES CORP13 citations69
US6093254AJul 25, 2000
Method of HF-HF Cleaning
LAM RES CORP6 citations69
US6679763B2Jan 20, 2004
Apparatus and method for qualifying a chemical mechanical planarization process
LAM RES CORP4 citations63
US8051863B2Nov 8, 2011
Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscus
LAM RES CORP2 citations57