Inventor
MILLER SAMUEL L
US8 patents
⚠️ This page may combine multiple inventors who share the name “MILLER SAMUEL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SANDIA CORP
6 patentsUS6507138B1Jan 14, 2003
Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement
SANDIA CORP121 citations97
US6133670AOct 17, 2000
Compact electrostatic comb actuator
SANDIA CORP173 citations97
US6567715B1May 20, 2003
Method and system for automated on-chip material and structural certification of MEMS devices
SANDIA CORP102 citations96
US6211599B1Apr 3, 2001
Microelectromechanical ratcheting apparatus
SANDIA CORP99 citations96
US6082208AJul 4, 2000
Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed
SANDIA CORP74 citations95
US6313562B1Nov 6, 2001
Microelectromechanical ratcheting apparatus
SANDIA CORP71 citations94