Inventor
LI MEI-YEN
TW10 patents
Patents
10 patentsUS6307628B1Oct 23, 2001
Method and apparatus for CMP end point detection using confocal optics
TAIWAN SEMICONDUCTOR MFG59 citations95
US6033967AMar 7, 2000
Method for increasing capacitance in DRAM capacitors and devices formed
TAIWAN SEMICONDUCTOR MFG33 citations89
US6087217AJul 11, 2000
Method for improving capacitance in DRAM capacitors and devices formed
TAIWAN SEMICONDUCTOR MFG16 citations81
US6020234AFeb 1, 2000
Increasing capacitance for high density DRAM by microlithography patterning
TAIWAN SEMICONDUCTOR MFG7 citations72
US6194249B1Feb 27, 2001
Method of assembly stress protection
TAIWAN SEMICONDUCTOR MFG11 citations71
US6812156B2Nov 2, 2004
Method to reduce residual particulate contamination in CVD and PVD semiconductor wafer manufacturing
TAIWAN SEMICONDUCTOR MFG7 citations65
US7386418B2Jun 10, 2008
Yield analysis method
TAIWAN SEMICONDUCTOR MFG6 citations60
US6716740B2Apr 6, 2004
Method for depositing silicon oxide incorporating an outgassing step
TAIWAN SEMICONDUCTOR MFG6 citations60
US6242355B1Jun 5, 2001
Method for insulating metal conductors by spin-on-glass and devices made
TAIWAN SEMICONDUCTOR MFG4 citations56
US7205167B2Apr 17, 2007
Method to detect photoresist residue on a semiconductor device
TAIWAN SEMICONDUCTOR MFG1 citations49