Inventor

BHANDARI GAUTAM

US20 patents

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BHANDARI GAUTAM

ADVANCED TECH MATERIALS

Tantalum amide precursors for deposition of tantalum nitride on a substrate

Tantalum amide precursors for deposition of tantalum nitride on a substrate

Growth of BaSrTiO3 using polyamine-based precursors

Hydrogen sensor utilizing rare earth metal thin film detection element

Alkane and polyamine solvent compositions for liquid delivery chemical vapor deposition

Stable hydride source compositions for manufacture of semiconductor devices and structures

Burst pulse cleaning method and apparatus for liquid delivery system

Stable hydride source compositions for manufacture of semiconductor devices and structures

Copper precursor composition and process for manufacture of microelectronic device structures

Liquid reagent delivery system with constant thermal loading of vaporizer

Antimony/Lewis base adducts for Sb-ion implantation and formation of antimonide films

Apparatus and method for the in-situ generation of dopants

Method of forming bismuth-containing films by using bismuth amide compounds

Liquid delivery system comprising upstream pressure control means

Adhesion promotion method for electro-chemical copper metallization in IC applications

Anhydrous mononuclear tris(β-diketonate) bismuth compositions for deposition of bismuth-containing films, and method of making the same

Chemical vapor deposition precursors for deposition of copper

Adhesion promotion method for CVD copper metallization in IC applications

Adhesion promotion method for CVD copper metallization in IC applications

(unassigned)

Micro-machined thin film hydrogen gas sensor, and method of making and using the same