Inventor
PEASE R FABIAN W
US16 patents
⚠️ This page may combine multiple inventors who share the name “PEASE R FABIAN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BRION TECH INC
8 patentsUS6969837B2Nov 29, 2005
System and method for lithography process monitoring and control
BRION TECH INC82 citations99
US6884984B2Apr 26, 2005
System and method for lithography process monitoring and control
BRION TECH INC101 citations99
US6828542B2Dec 7, 2004
System and method for lithography process monitoring and control
BRION TECH INC120 citations99
US6806456B1Oct 19, 2004
System and method for lithography process monitoring and control
BRION TECH INC86 citations99
US6803554B2Oct 12, 2004
System and method for lithography process monitoring and control
BRION TECH INC107 citations99
US7053355B2May 30, 2006
System and method for lithography process monitoring and control
BRION TECH INC93 citations98
US6969864B2Nov 29, 2005
System and method for lithography process monitoring and control
BRION TECH INC71 citations98
US6906305B2Jun 14, 2005
System and method for aerial image sensing
BRION TECH INC69 citations98
UNIV LELAND STANFORD JUNIOR
6 patentsUS6064486AMay 16, 2000
Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals
UNIV LELAND STANFORD JUNIOR70 citations94
US5135609AAug 4, 1992
Quantum lithography mask and fabrication method
UNIV LELAND STANFORD JUNIOR24 citations92
US9520260B2Dec 13, 2016
Photo emitter X-ray source array (PeXSA)
UNIV LELAND STANFORD JUNIOR18 citations82
US7005795B2Feb 28, 2006
Electron bombardment of wide bandgap semiconductors for generating high brightness and narrow energy spread emission electrons
UNIV LELAND STANFORD JUNIOR7 citations70
US9406488B2Aug 2, 2016
Enhanced photoelectron sources using electron bombardment
UNIV LELAND STANFORD JUNIOR2 citations60
US9859097B2Jan 2, 2018
Vacuum tube electron microscope
UNIV LELAND STANFORD JUNIOR0 citations48