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Inventor
KAWASHIMA MOTOKO
JP
2 patents
Patents
2 patents
US5880497A
Mar 9, 1999
Semiconductor integrated circuit device having capacitance element and process of manufacturing the same
HITACHI LTD
18 citations
91
US5508540A
Apr 16, 1996
Semiconductor integrated circuit device and process of manufacturing the same
HITACHI LTD
30 citations
91